Object-moving method, object-moving apparatus, production...

Details Object-moving method, object-moving apparatus, production... Object-moving method, object-moving apparatus, production...

2007-02-06

2007-02-06

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110, C250S398000, C250S400000

Reexamination Certificate

active

10542145

ABSTRACT:
A method of moving an object includes a step of fixing the object to an object-moving device, a step of moving the object to a prescribed position by the object-moving device, and a step of releasing the object from the object-moving device. The fixing step includes forming a deposit for fixation of the object to the object-moving device by applying a first corpuscular beam in a first gas to form a deposit. The releasing step includes etching the deposit by applying a second corpuscular beam in contact with a second gas.

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Minami, Kazuyuki, et al. “YAG Laser Assisted Etching For Releasing Silicon Micro Structure,” Proceedings of the workshop on Micro Electro Mechanical Systems (MEMS), IEEE, Feb. 7, 1993, pp. 53-58.
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Terrill, R.E., et al. “Laser Chemical Vapor Deposition for Microelectronics Production,” Aerospace Conference, IEEE, Mar. 21, 1998, pp. 377-382.

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