Object inspection and/or modification system and method

Radiant energy – Inspection of solids or liquids by charged particles

Reexamination Certificate

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C250S307000, C073S105000

Reexamination Certificate

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07109482

ABSTRACT:
A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).

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