Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-09-19
2006-09-19
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C073S105000
Reexamination Certificate
active
07109482
ABSTRACT:
A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).
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Nguyen Kiet T.
Townsend and Townsend / and Crew LLP
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