Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1990-10-19
1992-02-25
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
25044211, 25044011, H01J 3720
Patent
active
050916513
ABSTRACT:
In an object holder which is intended for use in a charged particle beam system and which comprises a heating element there is provided an object carrier which cooperates with the heating element and which comprises an electrically insulating member having a supporting face and an aperture which reaches as far as the supporting face and which serves for the transmission of a charged particle beam, at least two current-conductive portions being connected to said insulating member, said contact portions contacting the object when the object is arranged on the supporting face. An object carrier of this kind enables electromigration studies in the object at high temperatures by application of a current through the object via the contact portions.
REFERENCES:
patent: 3151241 (1964-09-01), Hermann et al.
patent: 3624390 (1971-11-01), Watanabe
patent: 3896314 (1975-07-01), Nukui et al.
patent: 4034220 (1977-07-01), Le Ceressus et al.
patent: 4162401 (1979-07-01), King et al.
patent: 4219731 (1980-08-01), Migitaka et al.
patent: 4996433 (1991-02-01), Jones et al.
Berman Jack I.
Botjer William L.
Nguyen Kiet T.
U.S. Philips Corp.
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