Object handling device

Details Object handling device Object handling device

1989-09-13

1992-01-28

Spar, Robert J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

74479, 901 8, 901 21, 901 24, B25J 1100

Patent

active

050838962

ABSTRACT:
An object handling device successively transfers objects such as semiconductor wafers. The object handling device includes first and second collapsible arm units having hands for holding objects, a first drive shaft for selectively extending and contracting the first arm unit, a second drive shaft for selectively extending and contracting the second arm unit, a third drive shaft for turning the first and second arm units while keeping the first and second arm units in a relative positional relationship, the first, second, and third drive shafts being disposed coaxially with each other, and an actuator mechanism for angularly moving the first, second, and third drive shafts about their own axes independently of each other.

REFERENCES:
patent: 4626013 (1986-12-01), Barrows
patent: 4813846 (1989-03-01), Helms
patent: 4897015 (1990-01-01), Abbe et al.

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