Object adjustment device for a charged particle beam apparatus

Details Object adjustment device for a charged particle beam apparatus Object adjustment device for a charged particle beam apparatus

1974-11-07

1976-04-20

Borchelt, Archie R.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250441, 250311, G21K 506

Patent

active

039522032

ABSTRACT:
Object positioning apparatus for positioning the object to be observed in a orpuscular beam apparatus such as an electron microscope or the like having both lateral or rotational degrees of freedom in which means are provided to mechanically separate the lateral motion and rotational or tilting motion of the object whereby a point on the object can be laterally positioned on the rotational axis and after separation from the lateral moving means may then be rotated or tilted without wandering out of the field of view of the microscope.

REFERENCES:
patent: 2510349 (1950-06-01), Reisner
patent: 3086112 (1963-04-01), Riecke
patent: 3240934 (1966-03-01), Watanabe et al.
patent: 3435210 (1969-03-01), Valdre
patent: 3444367 (1969-05-01), Asmus
patent: 3476936 (1969-11-01), Mills
patent: 3521056 (1970-07-01), Suzuki
patent: 3628013 (1972-12-01), Heide
patent: 3648048 (1972-03-01), Cahan et al.
patent: 3708662 (1973-01-01), Kuiokawa et al.
patent: 3761709 (1973-09-01), Hasegawa et al.

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