Nozzle for vapor-phase epitaxial equipment

Details Nozzle for vapor-phase epitaxial equipment Nozzle for vapor-phase epitaxial equipment

2008-09-09

2008-09-09

Zarfas, Louis S (Department: 2914)

Machines not elsewhere specified

Miscellaneous

Design Patent

active

29275695

CLAIM:
The ornamental design for a nozzle for vapor-phase epitaxial equipment, as shown and described.

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patent: 2004/0035947 (2004-02-01), Ratnik
patent: 2006/0191532 (2006-08-01), Ross
patent: 2006/0254578 (2006-11-01), Boehm et al.
patent: 2007/0123007 (2007-05-01), Furutani et al.

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