Novel etch back process for tungsten contact/via filling

Details Novel etch back process for tungsten contact/via filling Novel etch back process for tungsten contact/via filling

1990-07-30

1991-07-30

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156646, 156656, 1566591, 20419233, 20419235, 252 791, 437187, 437192, 437203, 437245, B44C 122, C23F 102

Patent

active

050357689

ABSTRACT:
An etchback process for etching a refractory metal layer formed on a semiconductor substrate with a greatly reduced micro-loading effect. The etch proceeds in three steps. The first step is a uniform etch which utilizes a gas chemistry of SF.sub.6, O.sub.2 and He and proceeds for a predetermined time to remove most of the metal layer. The second step is a very uniform etch which utilizes a gas chemistry of SF.sub.6, Cl.sub.2 and He and proceeds until the endpoint is detected. The endpoint is detected by measurement and integration of the 772 nm and 775 nm lines of Cl. The third step is a timed etch utilizing a gas chemistry of Cl.sub.2 and He which is used as both an overetch to ensure complete removal of the refractory metal film and as a selective etchant to remove an adhesion underlayer.

REFERENCES:
patent: 4502913 (1985-03-01), Lechaton et al.
patent: 4713141 (1987-12-01), Tsang
patent: 4786360 (1988-11-01), Cote et al.
patent: 4936950 (1990-06-01), Doan et al.
"Real-Time Etch Plasma Monitor System," IBM Technical Disclosure Bulletin, vol. 25, No. 11A, Apr. 1983, pp. 5721-5723.

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