Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-02-06
2007-02-06
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
10840443
ABSTRACT:
A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
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Nguyen Tu T.
Stallman & Pollock LLP
Therma-Wave, Inc.
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