Nonvolatile semiconductor memory with raised source and drain

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257322, 257382, 257754, H01L 2978

Patent

active

053810287

ABSTRACT:
The MOS field-effect transistor has a semiconductor substrate of a first conductivity type, a pair of first polycrystalline silicon layers of a second conductivity type different from the first conductivity type which are formed on the semiconductor substrate and separated from each other by a small gap, a pair of diffusion layers of the second conductivity type formed in those regions of the semiconductor substrate which are in contact with the pair of first polycrystalline silicon layers, respectively, a gate insulating film formed to cover the pair of first polycrystalline silicon layers of the second conductivity type and a part of the semiconductor substrate exposed to an outside at the small gap, and a gate electrode formed on the gate insulating film. The nonvolatile semiconductor memory device is arranged by using the MOS field-effect transistor mentioned above.

REFERENCES:
patent: 5045901 (1991-09-01), Komori et al.
patent: 5175118 (1992-12-01), Yoneda
patent: 5270232 (1993-12-01), Kimura
16M EPROM Cell Technology, Nikkei Micro Devices, Jan. 1990, pp. 101-107.

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