Nonvolatile semiconductor memory device and manufacturing method

Details Nonvolatile semiconductor memory device and manufacturing method Nonvolatile semiconductor memory device and manufacturing method

1997-05-05

1999-10-26

Prenty, Mark V.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257900, H01L 29788

Patent

active

059733551

ABSTRACT:
There is disclosed a nonvolatile semiconductor memory device, which is capable of maintaining a high capacitance ratio even when a memory cell is formed in a micronized size without increasing the number of manufacturing steps. In a flash memory having buried diffusion layer type cells, a source region and drain regions and are formed in self alignment with a polycrystalline film pattern which has a polycrystalline silicon film having projecting and recessing parts in its upper surface.

REFERENCES:
patent: 5650648 (1997-07-01), Kapoor

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