Nonvolatile semiconductor memory device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Reexamination Certificate

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07847331

ABSTRACT:
In a situation where a memory cell includes an ONO film, which comprises a silicon nitride film for charge storage and oxide films positioned above and below the silicon nitride film; a memory gate above the ONO film; a select gate, which is adjacent to a lateral surface of the memory gate via the ONO film; a gate insulator positioned below the select gate; a source region; and a drain region, an erase operation is performed by injecting holes generated by BTBT into the silicon nitride film while applying a positive potential to the source region, applying a negative potential to the memory gate, applying a positive potential to the select gate, and flowing a current from the drain region to the source region, thus improving the characteristics of a nonvolatile semiconductor memory device.

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patent: 7053442 (2006-05-01), Maemura
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patent: 2003/0198086 (2003-10-01), Shukuri
patent: 2001-102466 (2001-04-01), None
patent: 2003-046002 (2003-02-01), None
patent: WO03012878 (2003-02-01), None
Ielmini et al., “Experimental and Monte Carlo analysis of drain-avalanche hot-hole injection for reliability optimization in Flash memories,” IEEE International Electron Devices Meeting 2003, pp. 157-160.

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