Nonvolatile semiconductor memory and method of manufacturing...

Details Nonvolatile semiconductor memory and method of manufacturing... Nonvolatile semiconductor memory and method of manufacturing...

2008-02-26

2010-11-09

Mandala, Victor A (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S314000, C257SE29264, C257SE29300, C257SE21409, C438S257000

Reexamination Certificate

active

07829950

ABSTRACT:
A nonvolatile semiconductor memory has a semiconductor substrate, a first insulating film formed on a channel region on a surface portion of the semiconductor substrate, a charge accumulating layer formed on the first insulating film, a second insulating film formed on the charge accumulating layer, a control gate electrode formed on the second insulating film, and a third insulating film including an Si—N bond that is formed on a bottom surface and side surfaces of the charge accumulating layer.

REFERENCES:
patent: 6200858 (2001-03-01), Kokubu
patent: 6472281 (2002-10-01), Doi et al.
patent: 7060559 (2006-06-01), Ozawa et al.
patent: 2005/0179069 (2005-08-01), Wakamiya
patent: 2006/0240619 (2006-10-01), Ozawa et al.
patent: 07-249697 (1995-09-01), None
patent: 2006-80150 (2006-07-01), None
Akahori et al.; “Nonvolatile Semiconductor Memory Device”; U.S. Appl. No. 11/870,793, filed Oct. 11, 2007.
Takeuchi et al; “Semiconductor Memory Device and Method for Manufacturing the Same”; U.S. Appl. No. 11/870,839, filed Oct. 11, 2007.
Aoki et al.; “Semiconductor Device and Method of Fabricating the Same”; U.S. Appl. No. 11/902,752, filed Sep. 25, 2007.
Notification of Reasons for Rejection issued by the Korean Patent Office on Nov. 23, 2009, for Korean Patent Application No. 10-2008-0017327, and English-language translation thereof.

Affiliated with

Also associated with

Rating

Nonvolatile semiconductor memory and method of manufacturing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Nonvolatile semiconductor memory and method of manufacturing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Nonvolatile semiconductor memory and method of manufacturing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4204457