Nonvolatile memory and nonvolatile memory manufacturing method

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S324000, C257S326000

Reexamination Certificate

active

07064382

ABSTRACT:
A nonvolatile memory device includes source and drain regions formed in a semiconductor substrate, and an insulating film formed on a channel region between the source region and the drain region in the semiconductor substrate. The nonvolatile memory device also includes a dielectric film formed above the channel region to store electric charge, and a control gate formed on the dielectric film. Compressive stress in the channel region is equal to or less than 50 MPa.

REFERENCES:
patent: 6977408 (2005-12-01), Lin et al.
patent: 2003/0181005 (2003-09-01), Hachimine et al.
patent: 2005/0051855 (2005-03-01), Kanegae et al.
patent: 8-31962 (1996-02-01), None

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