Non-volatile semiconductor memory device and process of...

Details Non-volatile semiconductor memory device and process of... Non-volatile semiconductor memory device and process of...

2009-02-09

2010-06-08

Chaudhari, Chandra (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257SE27103

Reexamination Certificate

active

07732873

ABSTRACT:
In device isolation trenches, a first device-isolation insulator film is formed to have recesses thereon and a second device-isolation insulator film is formed in the recesses. The uppermost portions at both ends of the first device-isolation insulator film are located higher than the uppermost portions at both ends of the second device-isolation insulator film.

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