Non-volatile memory structure including protection and structure

Details Non-volatile memory structure including protection and structure Non-volatile memory structure including protection and structure

1994-10-13

1995-10-10

Limanek, Robert P.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257356, 257360, 257529, H01L 2702

Patent

active

054573360

ABSTRACT:
An improved nonvolatile memory device is provided, in which the threshold voltage variations (V.sub.ts) and transconductance degradation are significantly reduced. The NVM includes protection structure for limiting the process induced damage incurred during the manufacturing process. The protection structure is utilized to provide reliable and stable dielectrical characteristics for the NVM device. The protection structure is easy to implement and will not affect the conventional NVM performance.

REFERENCES:
patent: 5315145 (1994-05-01), Lukaszek

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