Non-volatile memory device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C438S259000, C438S283000, C438S284000, C257SE29112, C257SE29129, C257SE29130

Reexamination Certificate

active

11073134

ABSTRACT:
A non-volatile memory device includes a fin body protruded from a semiconductor substrate. The fin body has first and second side surfaces opposite to each other. An inner dielectric layer pattern is formed on an upper surface, and the first and second side surfaces of the fin body. A floating gate electrode is formed on the inner dielectric layer pattern. The floating gate electrode has an uneven upper surface. An outer dielectric layer is formed on the floating gate electrode. A control gate electrode is formed on the outer dielectric layer.

REFERENCES:
patent: 6468862 (2002-10-01), Tseng
patent: 7005700 (2006-02-01), Lee
patent: 2002/0093073 (2002-07-01), Mori et al.
patent: 2003/0042531 (2003-03-01), Lee et al.
patent: 2003/0151077 (2003-08-01), Mathew et al.
patent: 2003/0178670 (2003-09-01), Fried et al.
patent: 2005/0227435 (2005-10-01), Oh et al.
patent: 2005/0266638 (2005-12-01), Cho et al.
patent: 2005/0272192 (2005-12-01), Oh et al.
patent: 1997-0060484 (1997-08-01), None
patent: 2001-0003086 (2001-01-01), None
English language abstract of Korean Publication No. 1997-0060484.
English language abstract of Korean Publication No. 2001-0003086.

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