Non-volatile memory

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S314000, C257S315000, C257SE21209, C438S257000, C365S185040

Reexamination Certificate

active

11180080

ABSTRACT:
A stacked structure is formed over a substrate, and the stacked structure has a gate dielectric layer and a floating gate thereon. A first dielectric layer, a second dielectric layer and a third dielectric layer are respectively formed over the top and the sidewalls of the stacked structure and the exposed substrate. A charge storage layer covers over the top and sidewalls of the stacked structure. Also, a pair of auxiliary gates is formed over the substrate beside the charge storage layer, and a gap is between the auxiliary gates and the charge storage layer.

REFERENCES:
patent: 5422504 (1995-06-01), Chang et al.
patent: 5625213 (1997-04-01), Hong et al.
“A Novel CMOS-Compatible Top-Floating-Gate EEPROM Cell for Embedded Applications” By Author Diarmuid McCathy e al. / IEEE Transactions on Electron Devices, vol. 50, No. 7, Jul. 2003 / p. 1708-1711.
“90-nm-node multi-level AG-AND type flash memory with cell size of true 2 F2/bit and programming throughput of 10 MB/s” By Author Y. Sasago et al / 2003 IEEE.

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