Non-intrusive plasma probe

Details Non-intrusive plasma probe Non-intrusive plasma probe

2005-05-17

2005-05-17

Le, N. (Department: 2858)

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

C324S464000, C073S030040

Reexamination Certificate

active

06894474

ABSTRACT:
A probe for measuring plasma properties in a processing chamber, comprises a conductive rod having a front portion and a rear portion. The front portion of the conductive rod comprises a probe surface adapted to be coplanar with an interior wall of the chamber. The probe also includes an insulating sheath circumscribing the conductive rod.

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