Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Finishing or perfecting composition or product
Patent
1995-07-07
1997-01-28
Chapman, Mark
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Finishing or perfecting composition or product
430256, 430258, 510176, G03C 500, C11D 706
Patent
active
055976786
ABSTRACT:
A non-corrosive positive photoresist stripper composition comprising:
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Honda Kenji
Maw Taishih
Perry Donald F.
Chapman Mark
OCG Microelectronic Materials Inc.
Simons William A.
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