Non-corrosion photoresist stripping composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Finishing or perfecting composition or product

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Details

430256, 430258, 252156, 252158, 252548, G03C 500

Patent

active

054728304

ABSTRACT:
A non-corrosive photoresist stripping composition containing:

REFERENCES:
patent: 4306933 (1981-12-01), Da Fonte, Jr.
patent: 4617251 (1986-10-01), Sizensky
patent: 4770713 (1988-09-01), Ward
patent: 4786578 (1988-11-01), Neisius et al.
patent: 4824762 (1989-04-01), Kobayashi et al.
patent: 4824763 (1989-04-01), Lee
patent: 4904571 (1990-02-01), Miyashita et al.
patent: 5279771 (1994-01-01), Lee

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