Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Finishing or perfecting composition or product
Patent
1994-04-18
1995-12-05
Chapman, Mark A.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Finishing or perfecting composition or product
430256, 430258, 252156, 252158, 252548, G03C 500
Patent
active
054728304
ABSTRACT:
A non-corrosive photoresist stripping composition containing:
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Chapman Mark A.
OCG Microelectronic Materials Inc.
Simons William A.
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