Thermal measuring and testing – Distance or angle – Thickness – erosion – or deposition
Patent
1994-01-12
1996-02-13
Cuchlinski, Jr., William A.
Thermal measuring and testing
Distance or angle
Thickness, erosion, or deposition
374121, 374127, 374128, 374133, 364557, G01B 1106, G01J 506, H01L 2166
Patent
active
054907284
ABSTRACT:
Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measuring the combined intensities (53) of that radiation after modification by the substrate surface and radiation emitted from the surface. Precise determinations of emissivity, reflectivity, temperature, changing surface composition, the existence of any layer formed on the surface and its thickness are all possible from this measurement. They may be made in situ and substantially in real time, thus allowing the measurement to control (39, 41) various processes of treating a substrate surface. This has significant applicability to semiconductor wafer processing and metal processing.
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Adams Bruce E.
Schietinger Charles W.
Cuchlinski Jr. William A.
Luxtron Corporation
Worth Willie Morris
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