Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1996-08-02
1998-04-14
Hantis, K.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
G01B 1100
Patent
active
057399131
ABSTRACT:
A non-contact substrate alignment system for a lithography system is disclosed that comprises three substrate edge detectors. Each edge detector comprises a projector, preferably located above the substrate, that projects a light field down onto a substrate and a stage. The light field has a predetermined shadow line that is straight and runs perpendicularly to the direction of the substrate's edge. A camera is also located above the substrate and detects the light from the light field. The height differential between the substrate and stage causes a shift in the shadow line from the perspective of the camera. A controller connected to the camera utilizes this shift to locate the edge of the substrate. The problems associated with the mechanical banking techniques are thus avoided. Moreover, the technique uses detectors and projectors that can be located entirely above the substrate; specially designed stages with incorporated detectors or projectors are not required. The technique is also very tolerant of different types of substrates with different edge characteristics.
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Hantis K.
MRS Technology, Inc.
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