Non-absorbing anti-reflective coated (ARC) reticle using thin di

Details Non-absorbing anti-reflective coated (ARC) reticle using thin di Non-absorbing anti-reflective coated (ARC) reticle using thin di

1996-11-06

1998-07-14

Griffin, Steven P.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428433, 428469, 428698, 428702, 65 602, 65 604, 65 605, 65 608, 65DIG8, 430 5, B32B 1706, C03C 1734

Patent

active

057801614

ABSTRACT:
An anti-reflective reticle and a method by which the anti-reflective reticle is formed. Formed upon a first surface of a transparent substrate is a patterned metal layer. Formed upon at least one of: (1) the first surface of the transparent substrate including the patterned metal layer; or (2) the surface of the transparent substrate opposite the patterned metal layer is a two-layer dielectric stack. The two layer dielectric stack has a first dielectric layer which is closer to the transparent substrate and a second dielectric layer which is formed directly upon the first dielectric layer. The first dielectric layer has an index of refraction greater than the index of refraction of the transparent substrate or the second dielectric layer. The second dielectric layer has a thickness of about one-quarter the wavelength of reflected light desired to be attenuated or eliminated from the surface of the reticle.

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S. Wolf et al. "Silicon Processing in the VLSI Era-vol. 1" Lattice Press, Sunset Beach, CA, p. 441, 1986.

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