Nitride removal method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

134 1, 134 26, 134 30, 156646, 156655, 20419235, B44C 122, C03C 1500, C03C 2506

Patent

active

048774820

ABSTRACT:
A method for removing nitride coatings from metal tooling and mold surfaces without damaging the underlying base metal includes placing the nitride coated metal surface into a plasma reactor and subjecting it to a gaseous plasma comprising a reactive fluorine species. The reactive fluorine species may be derived from one or more of many well known gases. An optional step of cleaning the nitride coating is recommended.

REFERENCES:
patent: Re30505 (1981-02-01), Jacob
patent: 4657616 (1987-04-01), Benzing et al.
patent: 4676866 (1987-06-01), Tang et al.

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