Neutral sputtered films of metal alloy oxides

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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428432, 428630, C23C 1434, C23C 1408, C23C 1418

Patent

active

048348570

ABSTRACT:
A method for producing visually neutral high transmittance low emissivity coated articles comprising infrared reflective metal and antireflective metal oxide layers and an improved multiple layer coated article produced thereby, comprising a high refractive index neutral metal oxide layer between the antireflective metal oxide layer and the infrared reflective metal layer are disclosed.

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