Radiant energy – Electrically neutral molecular or atomic beam devices and...
Patent
1996-11-14
1998-10-06
Anderson, Bruce
Radiant energy
Electrically neutral molecular or atomic beam devices and...
H05H 300
Patent
active
058180400
ABSTRACT:
The present invention provides a neutral particle beam treatment apparatus which includes the following elements. A plasma generator is provided for generating a plasma from a treatment gas by alternation of application and discontinuation of a high frequency field. A negative ion accelerator is also provided for fetching negative ions from the plasma generated by the plasma generator and acceleration thereof to cause a negative ion beam. A neutralizer is further provided for neutralizing the negative ion beam to cause a neutral particle beam. A holder is still further provided for holding a sample at a position at which the neutral particle beam is irradiated.
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T. Ahn et al., "Negative ion measurements and etching in a pulsed-power inductively coupled plasma in chlorine", Plasma Sources Sci. Technol., vol. 5, 1996, pp. 139-144.
Kinoshita Keizo
Samukawa Seiji
Anderson Bruce
NEC Corporation
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