Negative-working radiation-sensitive mixture with polymer having

Details Negative-working radiation-sensitive mixture with polymer having Negative-working radiation-sensitive mixture with polymer having

1989-10-12

1991-01-29

Hamilton, Cynthia

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430280, 430287, 526257, 525 57, 525142, 525139, 525204, 522109, 522126, 522133, 522113, G03F 7038

Patent

active

049886061

ABSTRACT:
A negative-working radiation-sensitive mixture comprising a binder and a polymer containing 1,2,3-thiadiazole groups is disclosed. The binder is a polyfunctional compound having functional groups that react with ketene. The polymer is a compound obtained by polymerization of a compound of the general formula I ##STR1## in which R is a polymerizable group. If the polymer is a copolymer containing comonomers having functional groups capable of reacting with ketene, the binder can be omitted. The negative-working radiation-sensitive mixture is particularly suitable for UV, electron beam and X-ray lithography.

REFERENCES:
patent: 3457073 (1969-07-01), Delzenne
patent: 3539559 (1970-11-01), Ruckert
patent: 3558609 (1971-01-01), Ruckert
patent: 4387151 (1983-06-01), Bosse et al.
patent: 4631245 (1986-12-01), Pawlowski
patent: 4933259 (1990-06-01), Chihara et al.

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