Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1982-10-04
1985-05-28
Kittle, John E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430270, 430283, 525423, 525432, 528341, 528421, 20415919, G03C 171, G03C 170
Patent
active
045200971
ABSTRACT:
A polyamide polymer having recurring units represented by the formula: ##STR1## wherein R represents at least one divalent organic group, has excellent characteristics such as high sensitivity, high resolving power and excellent dry etching resistance suitable as a negative-type resist in ionizing radiation lithography.
REFERENCES:
patent: Re26018 (1966-05-01), Loshaek et al.
Hiroyuki Nakamura et al., "Synthesis of Polyamides having _Perhydro-azepine Units," Journal of Polymer Science: Polymer Chemistry Edition, vol. 16, pp. 3035-3038 (1978).
Aaron W. Levine et al., "Interaction of 5-keV Electrons with Isocyanate Homopolymers", Journal of Polymer Science: Polymer Chemistry Edition, vol. 11, 1973, pp. 311-313.
Naoya Ogata et al., "Relationship Between Electron Sensitivity and Chemical Structure of Polymers as E B Resists, I. Electron Sensitivity of Various Polyamides," Journal of Applied Polymer Science, vol. 28, 1983, pp. 699-708.
Chemical Abstracts, vol. 91, No. 3, Jul. 16th 1979, p. 656, No. 30458b, Columbus Ohio (USA); Y. Shimokawa et al., "Studies on Electron-crosslinkable Polymers, I. Electron-and Photosensitivity of N-allyloxymethylated Polyamide", Kobunshi Ronbunshu, 1979, vol. 36, No. 3, pp. 196-174 (Japanese).
Encyclopaedia Chimica, p. 594, 1974.
Fred W. Billmeyer, Jr., Textbook of Polymer Science, (John Wiley & Sons, Inc., New York, NY, 1962) p. 432.
Brandrup, J. and E. H. Immergut (eds.), Polymer Handbook (2nd ed.), (John Wiley & Sons, Inc., New York, NY, 1975) IV-254 to IV-255.
Hamilton Cynthia
Kittle John E.
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