Negative photosensitive composition and method for forming a res

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430325, 430330, 430927, 430945, 522 2, 522129, 522146, C03F 738

Patent

active

052866009

ABSTRACT:
A negative photosensitive composition comprising (a-1) a compound having at least two organic groups of the following formula (I):

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