Negative photosensitive composition and method for forming a res

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430325, 522 63, 522126, 522 51, C08F 246, C08F 404

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active

052926141

ABSTRACT:
A negative photosensitive composition comprising an alkali-soluble resin, a photo-acid-generating material and a crosslinking agent for the alkali-soluble resin, which acts under an acidic condition, wherein the crosslinking agent is a compound of the following formula (I): ##STR1## wherein each of A.sup.1 to A.sup.10 which are independent of one another, is a hydrogen atom, --CH.sub.2 OH or --CH.sub.2 OR, wherein R is C.sub.1 -C.sub.4 linear or branched chain alkyl, and X is C.sub.2 -C.sub.10 linear or branched chain alkylene, provided that at least four among A.sup.1 to A.sup.10 are --CH.sub.2 OR, and a plurality of --CH.sub.2 OR may be the same or different.

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