Negative photoresist compositions comprising a photosensitive co

Details Negative photoresist compositions comprising a photosensitive co Negative photoresist compositions comprising a photosensitive co

1993-04-16

1996-07-30

Rodee, Christopher D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430325, 522 63, 522166, G03C 173

Patent

active

055410367

ABSTRACT:
A negative photoresist composition comprising:

REFERENCES:
patent: 4581321 (1986-04-01), Stahlhofen
patent: 4619998 (1986-10-01), Buhr
patent: 4847314 (1989-07-01), Tortorello et al.
patent: 5034304 (1991-07-01), Feely
patent: 5128232 (1992-07-01), Thackeray et al.
patent: 5196481 (1993-03-01), Owens et al.
Polymer Science Dictionary, Mark Alger, pp. 255-256.

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