Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1989-11-30
1992-01-07
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430288, 430281, 430176, 430905, 522 31, 522 66, 522121, 522120, 522129, 522141, 522142, 522146, G03F 7029, G03F 7033, G03F 7037, G03F 7004
Patent
active
050791290
ABSTRACT:
The present invention relates to a negative photoresist consisting essentially of
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Meier Kurt
Roth Martin
Ciba-Geigy Corporation
Falber Harry
Hamilton Cynthia
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