Natural lithographic fabrication of microstructures over large a

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156646, 1566591, 204192E, 427198, 427272, 427282, B44C 122, C03C 1500, C03C 2506, H01L 21306

Patent

active

044076959

ABSTRACT:
Large area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.

REFERENCES:
patent: 4254163 (1981-03-01), Piazza
patent: 4315958 (1982-02-01), Peiffer et al.
U. Ch. Fischer and H. P. Zingsheim, J. Vac. Sci. Technol., 19(4), 881-885, Nov./Dec. 1981.
Appl. Phys. Lett., vol. 36, No. 9, May 1, 1980, A New Vacuum-Etched High-Transmittance (Antireflection) Film by Chris M. Horwitz, pp. 728-730.

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