Narrow body raised source/drain metal gate MOSFET

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S398000

Reexamination Certificate

active

07034361

ABSTRACT:
A semiconductor device includes a fin, a source region formed adjacent the fin and having a height greater than that of the fin, and a drain region formed adjacent the a second side of the fin and having a height greater than that of the fin. A metal gate region is formed at a top surface and at least one side surface of the fin. A width of the source and drain region may be greater than that of the fin. The semiconductor device may exhibit a reduced series resistance and an improved transistor drive current.

REFERENCES:
patent: 6395589 (2002-05-01), Yu
patent: 6455383 (2002-09-01), Wu
patent: 6835988 (2004-12-01), Yamashita
patent: 6864520 (2005-03-01), Fischetti et al.
patent: 6927130 (2005-08-01), Suzuki
patent: 2004/0227187 (2004-11-01), Cheng et al.
Digh Hisamoto et al.: “FinFET—A Self-Aligned Double-Gate MOSFET Scalable to 20 nm,” IEEE Transactions on Electron Devices, vol. 47, No. 12, Dec. 2000, pp. 2320-2325.
Yang-Kyu Choi et al.: “Sub-20nm CMOS Fin FET Technologies,” 2001 IEEE, IEDM, pp. 421-424.
Xuejue Huang et al.: “Sub-50 nm P-Channel Fin FET,” IEEE Transactions on Electron Devices, vol. 48, No. .5, May 2001, pp. 880-886.
Yang-Kyu Choi et al.: “Nanoscale CMOS Spacer FinFET for the Terabit Era,” IEEE Electron Device Letters, vol. 23, No. 1, Jan. 2002, pp. 25-27.
Xuejue Huang et al.: “Sub 50-nm FinFET: PMOS,” 1999 IEEE, IEDM, pp. 67-70.
Co-pending U.S. Appl. No. 10/632,965, filed Aug. 4, 2003, entitled: “Semiconductor Device Having A Thin Fin And Raised Source/Drain Areas,” Haihong Wang et al.; 18 page specification and 19 sheets of drawings.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Narrow body raised source/drain metal gate MOSFET does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Narrow body raised source/drain metal gate MOSFET, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Narrow body raised source/drain metal gate MOSFET will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3589519

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.