Nanostructures, nanogrooves, and nanowires

Details Nanostructures, nanogrooves, and nanowires Nanostructures, nanogrooves, and nanowires

2004-10-14

2008-08-05

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S682000, C700S222000

Reexamination Certificate

active

07407887

ABSTRACT:
Compositions and methods for making nanostructures and nanowires on substrates, including but not limited to metal-semiconductor nanostructures and semiconductor nanowires on semiconductor substrates. Particularly described are methods for making cobalt silicide nanostructures on silicon substrates and for making silicon nanowires on silicon substrates using cobalt nanoparticles. Nanogrooves and methods of making nanogrooves. Methods of making silanes.

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Written Opinion of the International Searching Authority mailed on Jan. 9, 2007, for PCT Application No. PCT/US04/33888 filed on Oct. 14, 2004, three pages.

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