Nanoparticle patterning process

Details Nanoparticle patterning process Nanoparticle patterning process

2006-06-02

2010-06-29

Chea, Thorl (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S324000, C430S318000, C430S330000

Reexamination Certificate

active

07745101

ABSTRACT:
A method of making a metallic pattern (250) comprises: depositing a layer of photoresist (130) on a substrate (110); forming a pattern on the photoresist; depositing a layer of metal nanoparticles (190) on the photoresist and pattern; removing the photoresist and overlying metal nanoparticles on the photoresist; and sintering the remaining nanoparticles to form a metallic pattern.

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