Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-03-27
2007-03-27
Vanore, David (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S234000, C073S105000, C073S863000
Reexamination Certificate
active
10093842
ABSTRACT:
Methods and apparatus are disclosed for nanomachining operations. Excitation energy settings are provided to minimize machine induced scan cutting. Cut operations can be operated in a feedback mode to provide controlled cutting operations. Measurement and sweep techniques to facilitate nanomachining operations are disclosed.
REFERENCES:
patent: 3586865 (1971-06-01), Baker et al.
patent: 3812288 (1974-05-01), Walsh et al.
patent: 4115806 (1978-09-01), Morton
patent: 4604520 (1986-08-01), Pohl
patent: 4672559 (1987-06-01), Jansson et al.
patent: 4673477 (1987-06-01), Ramalingram et al.
patent: RE32457 (1987-07-01), Matey
patent: 4681451 (1987-07-01), Guerra et al.
patent: 4697594 (1987-10-01), Mayo, Jr.
patent: 4793201 (1988-12-01), Kanai et al.
patent: 4831614 (1989-05-01), Duerig
patent: 4866986 (1989-09-01), Cichanski
patent: 4907195 (1990-03-01), Kazan et al.
patent: 4924091 (1990-05-01), Hansma et al.
patent: 4954704 (1990-09-01), Elings et al.
patent: 4999495 (1991-03-01), Miyata et al.
patent: 5001344 (1991-03-01), Kato et al.
patent: 5010249 (1991-04-01), Nishikawa
patent: 5015850 (1991-05-01), Zdeblick
patent: 5018865 (1991-05-01), Ferrell et al.
patent: 5025346 (1991-06-01), Tang
patent: 5038322 (1991-08-01), Van Loenen
patent: 5043577 (1991-08-01), Pohi
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5047649 (1991-09-01), Hodgson et al.
patent: 5072116 (1991-12-01), Kawade et al.
patent: 5081390 (1992-01-01), Elings et al.
patent: 5105305 (1992-04-01), Betzig et al.
patent: 5107112 (1992-04-01), Yanagisawa et al.
patent: 5108865 (1992-04-01), Zwaldo et al.
patent: 5118541 (1992-06-01), Yamamoto et al.
patent: 5138159 (1992-08-01), Takase et al.
patent: 5142145 (1992-08-01), Yasutake
patent: 5148308 (1992-09-01), Kopelman
patent: 5155589 (1992-10-01), Gere
patent: 5166520 (1992-11-01), Prater et al.
patent: 5187367 (1993-02-01), Miyazaki
patent: RE34214 (1993-04-01), Carlsson et al.
patent: 5210410 (1993-05-01), Barret
patent: 5216631 (1993-06-01), Sliwa
patent: 5220555 (1993-06-01), Yanagisawa
patent: 5231286 (1993-07-01), Kajimura et al.
patent: 5241527 (1993-08-01), Eguchi
patent: 5249077 (1993-09-01), Laronga
patent: 5252835 (1993-10-01), Lieber et al.
patent: 5253515 (1993-10-01), Toda et al.
patent: 5254209 (1993-10-01), Schmidt et al.
patent: 5254854 (1993-10-01), Betzig
patent: 5260824 (1993-11-01), Okada et al.
patent: 5276672 (1994-01-01), Miyazaki
patent: 5278704 (1994-01-01), Matsuda
patent: 5283437 (1994-02-01), Greschner et al.
patent: 5289004 (1994-02-01), Okada et al.
patent: 5289408 (1994-02-01), Mimura
patent: 5297130 (1994-03-01), Tagawa
patent: 5299184 (1994-03-01), Yamano
patent: 5302239 (1994-04-01), Roe et al.
patent: 5307311 (1994-04-01), Sliwa
patent: 5308974 (1994-05-01), Elings et al.
patent: 5317152 (1994-05-01), Takamatsu
patent: 5317533 (1994-05-01), Quate
patent: 5319961 (1994-06-01), Matsuyama et al.
patent: 5319977 (1994-06-01), Quate et al.
patent: 5322735 (1994-06-01), Fridez et al.
patent: RE34708 (1994-08-01), Hansma et al.
patent: 5338932 (1994-08-01), Theodore et al.
patent: 5343460 (1994-08-01), Miyazaki
patent: 5349735 (1994-09-01), Kawase
patent: 5353632 (1994-10-01), Nakagawa
patent: 5354985 (1994-10-01), Quate
patent: 5357109 (1994-10-01), Kusumoto
patent: 5357110 (1994-10-01), Statham
patent: 5360977 (1994-11-01), Onuki et al.
patent: 5362963 (1994-11-01), Kopelman et al.
patent: 5373494 (1994-12-01), Kawagishi
patent: 5389475 (1995-02-01), Yanagisawa
patent: 5392275 (1995-02-01), Kawada et al.
patent: 5393647 (1995-02-01), Neukermans et al.
patent: 5396483 (1995-03-01), Matsida
patent: 5408094 (1995-04-01), Kajimura
patent: 5412641 (1995-05-01), Shinjo
patent: 5414260 (1995-05-01), Takimoto et al.
patent: 5414690 (1995-05-01), Shido et al.
patent: 5416331 (1995-05-01), Ichikawa et al.
patent: 5418363 (1995-05-01), Elings et al.
patent: 5426631 (1995-06-01), Miyazaki et al.
patent: 5453970 (1995-09-01), Rust et al.
patent: 5455420 (1995-10-01), Ho et al.
patent: 5461605 (1995-10-01), Takimoto
patent: 5463897 (1995-11-01), Prater et al.
patent: 5471458 (1995-11-01), Oguchi et al.
patent: 5472881 (1995-12-01), Beebe et al.
patent: 5490132 (1996-02-01), Yagi et al.
patent: 5495109 (1996-02-01), Lindsay et al.
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 5506829 (1996-04-01), Yagi
patent: 5510615 (1996-04-01), Ho et al.
patent: 5519686 (1996-05-01), Yanagisawa et al.
patent: 5548117 (1996-08-01), Nakagawa
patent: 5559328 (1996-09-01), Weiss et al.
patent: 5560244 (1996-10-01), Prater et al.
patent: 5583286 (1996-12-01), Matsuyama
patent: 5602820 (1997-02-01), Wickramasinghe et al.
patent: 5610898 (1997-03-01), Takimoto
patent: 5623476 (1997-04-01), Eguchi
patent: 5634230 (1997-06-01), Maurer
patent: 5644512 (1997-07-01), Chernoff et al.
patent: 5679952 (1997-10-01), Lutwyche et al.
patent: 5717680 (1998-02-01), Yamano
patent: 5721721 (1998-02-01), Yanagisawa
patent: 5751683 (1998-05-01), Kley
patent: 5756997 (1998-05-01), Kley
patent: 5763879 (1998-06-01), Zimmer et al.
patent: 5804709 (1998-09-01), Bourgoin et al.
patent: 5821410 (1998-10-01), Xiang et al.
patent: 5825670 (1998-10-01), Chernoff et al.
patent: 5865978 (1999-02-01), Cohen
patent: 5874726 (1999-02-01), Haydon
patent: 5883387 (1999-03-01), Matsuyama et al.
patent: 5922214 (1999-07-01), Liu et al.
patent: 6031758 (2000-02-01), Gimsewski et al.
patent: 6066285 (2000-05-01), Galvin et al.
patent: 6101164 (2000-08-01), Kado et al.
patent: 6144028 (2000-11-01), Kley
patent: 6173604 (2001-01-01), Xiang et al.
patent: 6199269 (2001-03-01), Greco et al.
patent: 6201226 (2001-03-01), Shimada et al.
patent: 6229138 (2001-05-01), Kley
patent: 6229607 (2001-05-01), Shirai et al.
patent: 6229609 (2001-05-01), Muramatsu et al.
patent: 6232597 (2001-05-01), Kley
patent: 6239426 (2001-05-01), Muramatsu et al.
patent: 6242734 (2001-06-01), Kley
patent: 6249747 (2001-06-01), Bennig et al.
patent: 6252226 (2001-06-01), Kley
patent: 6265711 (2001-07-01), Kley
patent: 6281491 (2001-08-01), Kley
patent: 6337479 (2002-01-01), Kley
patent: 6339217 (2002-01-01), Kley
patent: 6340813 (2002-01-01), Tominaga et al.
patent: 6353219 (2002-03-01), Kley
patent: 6369379 (2002-04-01), Kley
patent: 6396054 (2002-05-01), Kley
patent: 6507553 (2003-01-01), Kley
patent: 6515277 (2003-02-01), Kley
patent: 6517249 (2003-02-01), Doll
patent: 6573369 (2003-06-01), Henderson et al.
patent: 6614227 (2003-09-01), Ookubo
patent: 6724712 (2004-04-01), Kley
patent: 6737331 (2004-05-01), Lewis et al.
patent: 6752008 (2004-06-01), Kley
patent: 6787768 (2004-09-01), Kley et al.
patent: 6802646 (2004-10-01), Kley
patent: 2001/0010668 (2001-08-01), Kley
patent: 2002/0007667 (2002-01-01), Pohl et al.
patent: 2002/0117611 (2002-08-01), Kley
patent: 2002/0135755 (2002-09-01), Kley
patent: 2002/0189330 (2002-12-01), Mancevski et al.
patent: 2003/0012657 (2003-01-01), Marr et al.
patent: 2003/0027354 (2003-02-01), Geli
patent: 2003/0062193 (2003-04-01), Thaysen et al.
patent: 2003/0089182 (2003-05-01), Thaysen et al.
patent: 2003/0167831 (2003-09-01), Kley
patent: 2004/0118192 (2004-06-01), Kley
patent: 0325058 (1989-07-01), None
patent: 61-133065 (1986-06-01), None
patent: 1-262403 (1989-10-01), None
patent: 7-105580 (1995-04-01), None
patent: WO 96/03641 (1996-02-01), None
patent: WO 97/04449 (1997-02-01), None
patent: WO 98/34092 (1998-08-01), None
patent: WO 01/03157 (2001-01-01), None
patent: WO03/046473 (2003-06-01), None
patent: WO04/023490 (2004-03-01), None
Digital Instruments Training Notebook vol. 3, 2000.
Jaschke et al. “Deposition of Organic Material by the Tip of a Scanning Force Microscope,” Langmuir 11:1061-1064 (1995).
Ager et al., “Multilayer hard carbon films with low wear rates,”Surface and Coatings Technology, 91:91-94 (1997).
Betzig et al “Near-Field Optics: Microscopy Spectroscopy and Surface Modification Beyond the Diffraction Limit” Science 257:(1992).
Dai et al. “Nanotubes as nanoprobes in scanning probe microscopy,” Nature 384:147-150 (1996).
Davis “Deposition characterization and device development in diamond silicon
General Nanotechnology LLC
Johnston Phillip A.
Vanore David
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