Nanolithographic calibration methods

Details Nanolithographic calibration methods Nanolithographic calibration methods

2006-06-13

2006-06-13

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Reexamination Certificate

active

07060977

ABSTRACT:
A system and method for calibration of nanolithography includes fabricating a nanoscale test pattern, measuring a parameter of the test pattern, and calculating a calibration coefficient from the measured parameter. The calculated calibration coefficient is then used for nanolithography. Nanolithography can be carried out with nanoscopic tips depositing patterning compounds on a substrate.

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Cruchon-Dupeyrat et al. “Nanofabrication using computer-assisted design and automated vector-scanning probe lithography” Applied Surface Science, 175-176 (2001) 636-642.

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