Nanodisplacement producing apparatus

Details Nanodisplacement producing apparatus Nanodisplacement producing apparatus

1994-11-16

1996-05-28

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, 2504922, 310317, H01J 3720

Patent

active

055213901

ABSTRACT:
An optical nanodisplacement producing apparatus is realized by employing an optical parametric oscillator of which cavity length is varied in correspondence with a wavelength or the intensity of the output light signal to achieve a fine-displacement producing mechanism. An optical nanodisplacement producing apparatus having high resolution less than 0.1 nm and a highly stable characteristic is realized as a very fine pattern forming/monitoring apparatus.

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C. Julian Chen, "Introduction to Scanning Tunneling Microscopy", Oxford University Press, (1993).
A. Heidmann et al. The American Physical Society, vol. 59, No. 22 pp. 2555-2557 (1987).
T. Debuisschert et al., "Quantum Optics", vol. 1, pp. 3-9, (1989).

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