Nano tip and fabrication method of the same

Details Nano tip and fabrication method of the same Nano tip and fabrication method of the same

2006-08-21

2008-10-28

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C073S105000, C977S876000

Reexamination Certificate

active

07442926

ABSTRACT:
The present invention relates to a nano tip and a fabrication method of the nano tip that is generally usable in mechanical, physical, and electrical devices for detecting surface signals or chemical signals, or is usable for a source scanning energy beam.The fabrication method of a nano tip according to the present invention includes providing a supporting holder that is fixed at one end thereof to a mechanical or electrical device, bonding a carbon nanotube to the free end of the supporting holder, and modifying the property or the shape of the carbon nanotube by scanning an energy beam thereto.The nano tip, having improved stiffness and perpendicularity, is fabricated by adjusting the length, the diameter, and the shape of the end of the carbon nanotube tip attached with carbon nanotubes by means of the energy beam so that the nano tip may stably and repeatedly reproduce information of a sample and may minimize a deviation between the tips.

REFERENCES:
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patent: 2002-162337 (2002-06-01), None
Zhang et al., “Filling of single-walled carbon nanotubes with silver”, Journal of Materials Research, vol. 15, No. 12, Dec. 2000, pp. 2658-2661.
Yenilmez et al., Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy, Applied Physics letters, vol. 80, No. 12, Mar. 2002, pp. 2225-2227.

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