Nano-resonator including beam with composite structure

Details Nano-resonator including beam with composite structure Nano-resonator including beam with composite structure

2008-02-28

2011-10-25

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S200000, C977S712000, C977S720000, C977S724000, C977S932000, C257S415000, C257S421000, C257SE29104, C257SE29167

Reexamination Certificate

active

08044750

ABSTRACT:
A nano-resonator including a beam having a composite structure may include a silicon carbide beam and/or a metal conductor. The metal conductor may be vapor-deposited on the silicon carbide beam. The metal conductor may have a density lower than a density of the silicon carbide beam.

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