Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-07-12
2008-09-30
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100
Reexamination Certificate
active
07429717
ABSTRACT:
The present invention relates to an apparatus and method for heating a semiconductor processing chamber. One embodiment of the present invention provides a furnace for heating a semiconductor processing chamber. The furnace comprises a heater surrounding side walls of the semiconductor processing chamber, wherein the heater comprises a plurality of heating elements connected in at least two independently controlled zones, and a shell surrounding the heater.
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Applied Materials Inc.
Fuqua Shawntina
Patterson & Sheridan LLP
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