Multistage cylindrical mirror analyzer incorporating a coaxial e

Details Multistage cylindrical mirror analyzer incorporating a coaxial e Multistage cylindrical mirror analyzer incorporating a coaxial e

1978-12-21

1980-09-23

Dixon, Harold A.

Radiant energy

Electron energy analysis

250310, H01J 3900

Patent

active

042245184

ABSTRACT:
A multi-stage cylindrical mirror analyzer incorporates a primary radiation source, such as an electron gun, disposed internally and along the axis of the multi-stage analyzer. The gun includes all of the optical elements for producing a well defined beam, correcting aberration thereof and scanning the beam on a sample. The components of the gun are distributed along the axial length of the analyzer. Aberration of the scanned beam due to traversal of a subsequent lense is minimized by placing the pivot point of the deflected beam trajectory substantially at the center of the lense. The greater dispersion of the multi-stage analyzer and the unit magnification thereof permit proportionately greater exit aperture dimensions, whereby a wider field of view may be realized.

REFERENCES:
patent: 3699331 (1972-10-01), Palmberg
patent: 3739170 (1973-06-01), Bohn
patent: 3787692 (1974-01-01), Anderson
patent: 3920990 (1975-11-01), Niewwland
patent: 3935453 (1976-01-01), Liebl
patent: 4107526 (1978-08-01), McKinney et al.
Annal der Physik, vol. 39, 1941, p. 62.

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