Multiple-tip scanning tunneling microscopy

Details Multiple-tip scanning tunneling microscopy Multiple-tip scanning tunneling microscopy

1992-09-08

1994-11-01

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3726

Patent

active

053609786

ABSTRACT:
The multiple STM-tip unit comprises a plurality of individually connectable, electrically separated tunnel tips (52 . . . 54) arranged in a common sandwiched block (5), in the form of a plurality of electrically conducting layers (41, 46, 50) each associated with at least one of said tunnel tips (52 . . . 54) with insulating layers (44, 48) intercalated between said conducting layers (41, 46, 50), the latter each having a contact pad (36, 42, 43) for connection to appertaining electronics. The thickness, area, and material characteristics of said insulating layers (44, 48) are chosen such that the tunnel current through any one of the intercalated insulating layers (44, 48) is negligible with respect to the tunnel current flowing across the gap between the involved tunnel tips (52 . . . 54) and the surface with which said tips cooperate.

REFERENCES:
patent: 4906804 (1990-03-01), Zdeblick et al.
patent: 4998016 (1991-03-01), Nose et al.
patent: 5182724 (1993-06-01), Yanagisawa et al.
patent: 5270543 (1993-12-01), Visser et al.

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