Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate
2007-08-27
2010-11-02
Vu, David (Department: 2818)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
C257S275000
Reexamination Certificate
active
07825005
ABSTRACT:
In one embodiment of the disclosure, a method includes providing a carrier substrate, forming a first region over an upper surface of the substrate, creating an electrical component using a planar process, embedding the electrical component in the dielectric layer, and removing a substrate portion of the electrical component. The first region includes a dielectric layer and may be made of any material that electrically isolates the electrical component from the carrier substrate. The electrical component may be created using a planar process thereby having an epitaxial surface that is embedded in the dielectric layer.
REFERENCES:
patent: 6195047 (2001-02-01), Richards
Baker & Botts L.L.P.
Raytheon Company
Vu David
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