Cleaning and liquid contact with solids – Apparatus – Electrically controlled
Patent
1999-03-05
2000-10-31
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
Electrically controlled
134 61, 134 66, 134902, B08B 704
Patent
active
061386944
ABSTRACT:
A multiple stage wet processing platform includes a sealable enclosure, at least two processing modules positioned within the enclosure, at least one of them including a housing having an opening and a door moveable into position covering the opening, at least two processing vessels within the housing, and an intra-module robot within the housing and including a wafer support member, the intra-module robot moveable to a first position in which the support is disposed in a first one of the processing vessels and a second position in which the support is disposed in a second one of the processing vessels. An inter-module robot is positioned within the enclosure and is moveable between a first position adjacent to a first one of the modules and a second position adjacent to a second one of the modules.
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Becia William Warren
Hall Randy Mark
Hansen Eric T.
Ives Thomas Wayne
Krawzak Thomas
Coe Philip R.
SCP Global Technologies
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