4. Cleaning and liquid contact with solids
  5. Apparatus
  6. Electrically controlled

Thomas Krawzak

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Multiple stage wet processing platform and method of use

Cleaning and liquid contact with solids – Apparatus – Electrically controlled
Patent

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Process cassette

Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1810449

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