Multiple spot size optical profilometer, ellipsometer,...

Details Multiple spot size optical profilometer, ellipsometer,... Multiple spot size optical profilometer, ellipsometer,...

2005-08-16

2005-08-16

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Plural test

Reexamination Certificate

active

06930765

ABSTRACT:
A combined optical profiler, ellipsometer, reflectometer and scatterometer is described which is configured to have user selectable spot sizes. An attached computer allows the user to select via software the desired spot size on the substrate.

REFERENCES:
patent: 3885875 (1975-05-01), Rosenfeld et al.
patent: 4332477 (1982-06-01), Sato
patent: 4585348 (1986-04-01), Chastang et al.
patent: 4668860 (1987-05-01), Anthon
patent: 4873430 (1989-10-01), Juliana et al.
patent: 5017012 (1991-05-01), Merritt, Jr. et al.
patent: 5129724 (1992-07-01), Brophy et al.
patent: 5196906 (1993-03-01), Stover et al.
patent: 5270794 (1993-12-01), Tsuji et al.
patent: 5293216 (1994-03-01), Moslehi
patent: 5313542 (1994-05-01), Castonguay
patent: 5406082 (1995-04-01), Pearson et al.
patent: 5446549 (1995-08-01), Mazumder et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5586101 (1996-12-01), Gage et al.
patent: 5608527 (1997-03-01), Valliant et al.
patent: 5610897 (1997-03-01), Yamamoto et al.
patent: 5633747 (1997-05-01), Nikoonahad
patent: 5644562 (1997-07-01), de Groot
patent: 5694214 (1997-12-01), Watanabe et al.
patent: 5715058 (1998-02-01), Bohnert et al.
patent: 5726455 (1998-03-01), Vurens
patent: 5748305 (1998-05-01), Shimono et al.
patent: 5777740 (1998-07-01), Lacey et al.
patent: 5864394 (1999-01-01), Jordan, III et al.
patent: 5875029 (1999-02-01), Jann et al.
patent: 5880838 (1999-03-01), Marx et al.
patent: 5951891 (1999-09-01), Barenboim et al.
patent: 5978091 (1999-11-01), Jann et al.
patent: 5985680 (1999-11-01), Singhal et al.
patent: 5986761 (1999-11-01), Crawforth et al.
patent: 5986763 (1999-11-01), Inoue
patent: 5995226 (1999-11-01), Abe et al.
patent: 6034378 (2000-03-01), Shiraishi
patent: 6081325 (2000-06-01), Leslie et al.
patent: 6088092 (2000-07-01), Chen et al.
patent: 6118525 (2000-09-01), Fossey et al.
patent: 6134011 (2000-10-01), Klein et al.
patent: 6157444 (2000-12-01), Tomitka et al.
patent: 6169601 (2001-01-01), Eremin et al.
patent: 6172752 (2001-01-01), Haruna et al.
patent: 6248988 (2001-06-01), Krantz
patent: 6307627 (2001-10-01), Vurens
patent: 6353222 (2002-03-01), Dotan
patent: 6542248 (2003-04-01), Schwarz
patent: 6603542 (2003-08-01), Chase et al.
patent: 6639662 (2003-10-01), Vaez-Iravani et al.
patent: 3-221804 (1991-09-01), None
patent: WO98/52019 (1998-11-01), None
Meeks, Steven W.: “A Combined Ellipsometer, Reflectometer, Scatterometer and Kerr Effect Microscope for Thin Film Disk Characterization,” Machine Vision Applications in Industrial Inspection VIII, Proceedings of SPIE, vol. 3966, 2000, pp. 385-391, XP001085220.
W.C. Leung, W. Crooks, H. Rosen and T. Strand,An Optical Method Using a Laser and an Integrating Sphere Combination for Characterizing the Thickness Profile of Magnetic Media, Sep. 1989, IEEE Transaction on Magnetics, vol. 25, No. 5. pp. 3659-3661.
Steven W. Meeks, Walter E. Weresin, and Hal J. Rosen,Optical Surface Analysis of the Head-Disk-Interface of Thin Film Disks, Jan. 1995, Transactions of ASME, Journal of Tribology, vol. 117, pp. 112-118.
Steven Meeks, Maxtor and Rusmin Kudinar,The Next Battleground:Head-Disk Interface, Mar. 1998, Data Storage, Test & Measurement, pp. 29-30, 34 and 38.
Laser Scanning Surface Profilometer, [online], Aug. 1970, [retrieved Jan. 29, 2001], pp. 789-790, Retrieved from the Internet: <URL:http://www.delphion.com/tdbs/tdb?&order=7OC101758.

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