Multiple slot load lock chamber and method of operation

Details Multiple slot load lock chamber and method of operation Multiple slot load lock chamber and method of operation

2010-02-22

2011-11-22

Keenan, James (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S939000

Reexamination Certificate

active

08061949

ABSTRACT:
Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.

REFERENCES:
patent: 5609689 (1997-03-01), Kato et al.
patent: 5882165 (1999-03-01), Maydan et al.
patent: 6059507 (2000-05-01), Adams
patent: 6338626 (2002-01-01), Saeki
patent: 6486444 (2002-11-01), Fairbairn et al.
patent: 6506693 (2003-01-01), Heyder et al.
patent: 6688375 (2004-02-01), Turner et al.
patent: 6719517 (2004-04-01), Beaulieu et al.
patent: 6729824 (2004-05-01), Lei et al.
patent: 6746195 (2004-06-01), Shirai
patent: 6918731 (2005-07-01), Talmer
patent: 6949143 (2005-09-01), Kurita et al.
patent: 7207766 (2007-04-01), Kurita et al.
patent: 7624772 (2009-12-01), Iwabuchi
patent: 7857569 (2010-12-01), Hiroki et al.
patent: 7878755 (2011-02-01), Klomp et al.
patent: 2005/0095088 (2005-05-01), Kurita et al.
patent: 2005/0118000 (2005-06-01), Kasai et al.
Official Letter dated Jun. 22, 2011, from Chinese Patent Office for corresponding Chinese Patent Application No. 200780000429.9.

Affiliated with

Also associated with

Rating

Multiple slot load lock chamber and method of operation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multiple slot load lock chamber and method of operation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple slot load lock chamber and method of operation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4296690