Material or article handling – Process – Of moving material between zones having different pressures...
Reexamination Certificate
2006-06-02
2010-02-23
Keenan, James (Department: 3652)
Material or article handling
Process
Of moving material between zones having different pressures...
C414S217000, C414S939000
Reexamination Certificate
active
07665951
ABSTRACT:
Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.
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Anwar Suhail
Kurita Shinichi
Lee Jae-Chull
Applied Materials Inc.
Keenan James
Patterson & Sheridan
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